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Kuka Robotics Corporation’s mobile robotic wafer-handling system for human/machine collaboration offers a solution for material transport of 200 mm or 300 mm wafer boxes and SMIF boxes, open cassette machine loading and unloading. The system combines a Kuka LBR iiwa 14 R820 CR robot mounted on one of the company’s KMP 200 CR automated mobile platforms. Both the robot and mobile platform are said to be cleanroom class ISO 3 rated and feature advanced safety and navigational functionality. For simplicity and ease of use, the solution is integrated with one controller for the robot, platform and navigation, as well as one software solution for all three.

Featuring the Kuka KR 10 Cybertech Nano six-axis robot designed for high working speeds that reduce cycle times and increase output, the bin-picking cell improves production, reduces error and streamlines processes. Guided by the Roboception Vision System, the cell robot identifies which items to pick and calculates the optimal motion paths to avoid collisions as it selects, picks and deposits the items. By detecting item positions and sending those coordinates to the robot, the Roboception system enables faster, more flexible picking.

In addition to repeatability of 0.04 mm, Kuka KR Cybertech Nano robots can mount in any installation position. With the smallest in-line wrists in their class, these robots reportedly enable work to be carried out in positions inaccessible for other robots and provide maximum performance with minimum disruptive contours that open up previously unreachable workspaces. They can cover long distances with an extremely large workspace to the rear and a long downward reach. The Cybertech Nano family of robots are protected against uncontrolled electrostatic discharging (ESD) and are suitable for use in humid or harsh environments.